[16p-K304-15~16] 8.6 Plasma Electronics English Session

17:15 〜 17:30英語発表

[16p-K304-15] A Study of Various Profiles in Plasma Processes for Functional Outputs

〇Osamu Sakai¹, Tomoyuki Murakami², Tsuyohito Ito³, Manabu Tanaka⁴, Makoto Kambara⁵, Satoshi Hirayama¹ (1.Univ. Shiga Pref., 2.Senkei Univ., 3.Univ. Tokyo, 4.Kyushu Univ., 5.Osaka Univ.)

キーワード：

plasma、network、entropy

Plasma for industrial uses has a variety of distributions with significant parameter gradients. Here, we focus on three distributions: spatial density profile, energy distribution, and species dispersity. Such multidimensional phase spaces are interwoven to each other, and temporal variations are rather larger in cases of plasma processes than other industrial tools/methods. In this study, to understand this complex system, we use measures based on network visualization and entropy.