講演情報
[17a-K501-2]Evaluation of sensing performance of amorphous and crystalline WO3 thin films for VOCs detection
〇Keying Huang1, Sankar Ganesh Ramaraj1, Chuanlai Zang1, Hiroyasu Yamahara1, Hitoshi Tabata1 (1.Tokyo Univ.)
キーワード：
Gas sensor、VOCs、Tungsten oxide
The detection of biomarker gases is critical for early disease diagnosis and environmental monitoring. Volatile organic compounds (VOCs), such as acetone (a diabetes biomarker) and p-cresol (an indicator of chronic kidney disease), offer valuable insights into physiological and pathological conditions. This study explores the potential of non-invasive skin gas sensors for real-time, continuous monitoring, addressing the limitations of traditional metal oxide semiconductor gas sensors, such as poor selectivity and signal drift.We systematically investigated and compared the gas sensing performance of amorphous and crystalline WO3 thin films for detecting acetone, ammonia, ethanol, and p-cresol at concentrations ranging from 0.1 to 100 ppm. Using pulsed laser deposition (PLD) and semiconductor processing techniques, WO3 thin films with precise structural control were fabricated. The amorphous WO3 thin films demonstrated higher overall sensitivity, particularly for basic gases like ammonia, attributed to their larger surface area and higher defect density. In contrast, crystalline WO3 thin films exhibited improved selectivity, especially for p-cresol, likely due to their ordered structure and stable interactions with gas molecules.The results emphasize the influence of acid-base interactions on gas sensing performance, with amorphous films excelling in sensitivity and crystalline films offering superior selectivity. These findings highlight the potential of optimized WO3-based sensors for selective p-cresol detection, providing a pathway toward improved health monitoring technologies and addressing key challenges in VOC detection.