講演情報
[17a-K501-4]Preparation of flexible VO2 thin films on CVD-grown hBN sheet and their application for strain sensors
〇Boyuan Yu1, Sharad Mane1, N. Azusa Hattori1, Satoru Fukamachi3, Hiroki Ago3, Hidekazu Tanaka1,2 (1.Osaka Univ. SANKEN, 2.Osaka Univ. OTRI, 3.Kyushu Univ.)
キーワード：
flexible sensor、VO2、hBN
Flexible sensors are gaining attention for their potential in wearable electronics due to their adaptability and sensitivity. Vanadium dioxide (VO2) is a promising material for strain sensors, showing a significant electrical resistance change during the metal-insulator transition (MIT) around room temperature. Single-crystal VO2 devices offer high gauge factors (GF) but have limited strain tolerance, while flexible polycrystalline VO2 sensors endure larger strains but do not fully exploit the MIT characteristics.In this study, we develop large-area flexible VO2 films on chemical vapor deposition (CVD)-grown hexagonal boron nitride (hBN) substrates. The unique properties of hBN enable VO2 films to maintain a high GF over a wide range of strain. VO2 films were deposited on hBN substrates using pulsed laser deposition (PLD) and characterized with electrodes at varying distances. These films exhibited consistent MIT properties, making them suitable for large-area device applications. We also created a flexible VO2/hBN/PDMS sensor and tested it under strain using a custom-built bending system. The sensor achieved a GF of 347 at a strain of approximately 15%, demonstrating its potential for high-performance strain sensing in flexible electronics.