講演情報
[17p-K302-7]Fabrication of vertically aligned Si nanowires and nanotubes structures by top-down methods
〇(M1)Bowen MA1,2, Jevasuwan Wipakorn1, Naoki Fukata1,2 (1.NIMS, 2.Univ. of Tsukuba)
キーワード：
SiC、Si、1D nanostructure
Nanoneedles are extensively applied in biomedicine, including biosensors, drug delivery, and implantable medical devices. Silicon nanoneedles, favored for their excellent biocompatibility and chemical stability, face limitations due to inadequate mechanical strength, which can lead to bending or breaking during fabrication and use. To address this, we successfully created Si nanowire and nanotube arrays using electron beam lithography, providing valuable insights for the eventual production of silicon carbide (SiC) nanoneedles via chemical vapor deposition (CVD). Extensive research shows that SiC nanoneedles possess exceptional structural strength and excel in stability, biocompatibility, and functionality, holding significant promise as the next generation of biomaterials. These nanoneedles are poised to surmount the mechanical weaknesses of silicon nanoneedles, offering superior solutions for biomedicine.