Presentation Information
[3F01]Evaluation method of surface roughness using SEM
*Kei Nagatomo1, Takeshi Otsuka1, Yuhei Nakajima1, Masahide Shima1, Katsuhiko Tashiro2 (1. JEOL Ltd., 2. Department of Science and Technology, Kanto Gakuin University)
Surface roughness is a parameter that indicates the degree of unevenness on surface. In this study, we examined the effectiveness of surface roughness measurement using Scanning Electron Microscope (SEM). Currently, the Photometric Stereo method (PS method), one of the 3D reconstruction techniques used in SEM, has been considered unsuitable for measuring surface roughness because the error in height accuracy increases when the surface inclination angle is large.The reason for this is that it is affected by the size of the surface inclination angle, and when the composition of the sample is different. To examine whether precise results could be obtained by eliminating these factors, we measured the surface roughness of plating as a sample with a constant composition and a small inclination angle. As a result, SEM height map images showed a high correlation with those from a laser microscope. Therefore, those results indicate that SEM is capable of measuring surface roughness of plating.