Presentation Information
[3F07]International standardization of methods for measuring cryopump performance
*Takahiro Yatsu1, Yoshinobu Murayama2, Atsuhiro Kuwajima3, Masafumi Kishi3 (1. Sumitomo Heavy Industries,Ltd., 2. ULVAC CRYOGENICS INCORPORATED, 3. CANON ANELVA CORPORATION)
The development of ISO standards for performance measurement methods of cryopumps was completed over a period of approximately three years, from October 2020 to December 2023. While there have been overseas standards (AVS, Pneurop) regarding performance measurement methods for cryopumps, international standardization had not been achieved, and each manufacturer evaluated their performance based on criteria determined by each company, referring to the content specified in the overseas standards. However, through this development, it is believed that a common benchmark has been defined. Although Japanese manufacturers have been pioneers within the cryopump industry, the absence of ISO standards may have served as a barrier to entry for latecomers. Taking this background into account, the content to be included in the standards was carefully examined, and it was established to be content that satisfies the Japanese side as well. We would like to express our gratitude to ULVAC CRYOGENIC INCORPORATED, CANON ANELVA CORPORATION, and the members of the joint committee of JVSS in the development of the standards.