Presentation Information
[3F08]Pumping speed measurement of Ti-Zr-VNEG coating for some gas species and degradation evaluation by repetitive air exposure and re-activation
*Takashi Shiga1,2, Junichiro Kamiya2, Kaoru Wada1, Masaya Kuramochi3 (1. Tokyo Electronics CO.,LTD, 2. Japan Atomic Energy Agency, 3. Total Support System Corporation)
The NEG coating on the chamber inner wall allows the chamber itself to function as a vacuum pump. However, previous studies have reported sticking probabilities for a limited number of gas species, mainly H2 and CO. In this study, the pumping speed of H2, CO, O2, CO2, and N2 were measured. In addition, the degradation of pumping speed due to repetitive air exposure and re-activation was evaluated for these gas species.