Presentation Information
[5P100]Improvement in Stability of Reactivation Performance of Oxygen-Free Pd/Ti Deposited Nonevaporable Getter (NEG) Pump
*YU KANO1, Kenichi Hamanaka1, Manabu Yabe1, Yoshihiro Kato1, Yusuke Masaoka1, Takashi Kikuchi2, Kazuhiko Mase2,3 (1. Irie Koken Co., Ltd., 2. KEK, 3. SOKENDAI)