Presentation Information
[5P103]Deposition of tin monoxide film using high-power impulse magnetron sputtering
*Yuta Saito1, Kazuya Ota2, Kosuke Takenaka2, Yuichi Setsuhara2, Takayuki Ohta1 (1. Department of Electrical and Electronic Engineering, Meijo University, 2. Joining and welding research institute, Osaka university)