Presentation Information
[5P95]Fabrication of Aluminum Oxide Thin Films by Plasma Immersion Lattice Target Sputtering Method
*Yuu Kiyama1, Takanobu Ima1, Yuuki Yamasaki1, Masamichi Naitoh1, Tomonori Ikari2 (1. Kyushu Institute of Technology, 2. National Institute of Technology, Ube Collage)