Presentation Information

[5P96]Application of Oxygen-Free Pd/Ti Nonevaporable Getter (NEG) Deposition to a Large Chamber with DN200CF (CF253) Ports

*Takashi Kikuchi¹, Ryoma Kataoka¹, Hirokazu Tanaka¹, Daisuke Wakabayashi^1,2, Takuji Ohigashi^1,2, Kazuhiko Mase^1,2 (1. Institute of Materials Structure Science, KEK, 2. Department of Materials Structure Science, SOKENDAI)

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