Presentation Information
[5P99]Oxygen-Free Pd/Ti Nonevaporable Getter (NEG) Deposition Applied for DN16 ConFlat (CF34) Cube and Flanges
Hiromu Nishiguchi3, Takashi Kikuchi1, *Kazuhiko Mase1,2 (1. KEK-IMSS-PF, 2. SOKENDAI, 3. Baroque International Inc.)