講演情報
[8p-N202-10]Examination of selective quantum well intermixing on III-V on insulator wafer
〇(M2)Sheng Fu1, Kasidit Toprasertpong1, Shinichi Takagi1, Mitsuru Takenaka1 (1.Univ. Tokyo)
キーワード：
III-V membrane、wafer bonding、active-passive integration
This research explores selective quantum well intermixing (QWI) on a III-V-on-insulator platform to create multiple bandgap energies for monolithic photonic integration. A single ion implantation was performed on patterned samples. Photoluminescence (PL) measurements indicates that phosphorus vacancies diffused laterally from the implanted areas, with an estimated diffusion length around 1 µm. The results demonstrate that controlling the bandgap energy is achievable through submicron-scale patterning, making selective QWI a promising technique for fabricating integrated photonic circuits.