講演情報
[14a-K502-8]Autonomous synthesis of metastable ferrite LnFeO3 thin films
〇Mikk Lippmaa1, Haotong Liang2, Ichiro Takeuchi2 (1.ISSP, Univ. of Tokyo, 2.Maryland Univ.)
キーワード：
metastable ferrite、autonomous synthesis、thin film
We demonstrate a new autonomous synthesis approach to optimizing the synthesis conditions of LnFeO3-type ferrite thin films by monitoring the film growth with RHEED and using a U-Net semantic segmentation tool to automaticaly extract diffraction features and crystal periodicity information from the diffraction images. The crystal periodicity, crystallinity, and the pattern evolution time dependence during film growth are used to assign a quality factor to each film sample. A simple Gaussian process is then used to automate the selection of synthesis process conditions (temperature, growth rate, oxygen pressure, PLD laser energy) for subsequent deposition experiments. We show that the optimization process converges rapidly with just a few deposition experiments even in a four-dimensional parameter space, greatly reducing the number of experiments typically done by a human operator.