[15p-K503-1~15] 6.1 強誘電体薄膜

13:30 〜 13:45奨励賞エントリー英語発表

[15p-K503-3] Water-soluble CaO sacrificial layer heteroepitaxially grown on yttria-stabilized zirconia substrate for large ferroelectric BaTiO₃ sheets

〇(D)Weikun Zhou¹, Diwen Chen¹, Ren Mitsuya¹, Hiromichi Ohta², Tsukasa Katayama^2,3 (1.IST-Hokkaido Univ., 2.RIES-Hokkaido Univ., 3.JST-PRESTO)

キーワード：

freestanding oxide sheet、ferroelectric thin film

Ferroelectric perovskite oxide sheets with high orientation and crystallinity are suitable for various applications. One promising technique for synthesizing such sheets involves a combination of epitaxial growth and the use of sacrificial layers that dissolve in solvents. However, the practical applications of these sacrificial layers are limited. These layers are typically grown on substrates such as SrTiO₃ single crystals, which have not yet been scaled up for large-area applications. Additionally, during the lift-off process, a high density of cracks often forms in the ferroelectric sheets. In this study, we demonstrate that high quality freestanding BaTiO₃ (BTO) sheets are obtained using new sacrificial layer of CaO which is epitaxially grown on [110]-oriented yttria-stabilized zirconia (YSZ) substrate. The obtained BTO sheet has a large area of 2 mm × 5 mm and exhibits ferroelectricity and piezoelectric at room temperature.