講演情報
[16a-K103-1]Nickel Electroplating Using a Supercritical Carbon Dioxide-Emulsified
Nickel Sulfamate Electrolyte toward MEMS Applications
〇WENDING HOU1, Tomoyuki Kurioka1, Chun-Yi Chen1, Tso-Fu Mark Chang1, Katsuyuki Machida1, Hiroyuki Ito1, Yoshihiro Miyake1, Masato Sone1 (1.Institute of Science Tokyo)
キーワード：
Ni electroplating、Nickel sulfamate electrolyte、Supercritical carbon dioxide
In this study, we demonstrate Ni electroplating using scCO2-emulsified nickel sulfamate baths and investigate the effects of various experimental parameters on the characteristics of the obtained Ni films. The effects of current density used in the Ni electroplating performed on 55 ℃ at 14 MPa with 40 vol% of scCO2 on the grain size estimated by Scherrer equation and Vickers hardness of the obtained Ni films are investigated. With the increase in the current density, their grain size became smaller and smaller, which resulted in an increase in their Vickers hardness, presumably due to the Hall-Petch law. In the presentation, we will also discuss the effects of other experimental parameters, such as pressure and scCO2 volume ratio.