[16a-K506-1~10] 3.6 レーザープロセシング

10:45 〜 11:00英語発表

[16a-K506-7] Improvement of Two-photon Polymerization Resolution of SU-8 by GHz Burst Mode Femtosecond Laser

〇(P)Ashkan MomeniBidzard¹, Shota Kawabata^1,2, Kotaro Obata¹, Mirai Hanzawa^1,2, Koji Sugioka¹ (1.RIKEN, RAP, 2.TUAT)

キーワード：

Femtosecond Laser Processing、GHz burst、Two-photon polymerization

This study investigates two-photon polymerization (TPP) of SU-8 using a green-wavelength (515 nm) GHz burst mode fs laser. We show superiority of the GHz burst mode over the conventional single-pulse mode for improving the fabrication resolution when fabricating SU-8 suspended polymerized lines. The experimental results reveal that for the polymerized lines with a length of ~10 µm, the TPP resolution along the beam axis is improved by ~28% using the GHz burst pulses.