講演情報
[17a-K305-7]Design of Layer-to-Layer Coupler between Si and SiON Waveguides using Low Index (~1.6) SiON
〇(M1)Haoyu Chen1, Eissa Moataz1, Kaibin Yao1, Tsuyoshi Horikawa1, Nobuhiko Nishiyama1,2 (1.Science Tokyo, 2.PETRA)
キーワード：
Layer-to-Layer Coupler、SiON
In this study, a SiON waveguide and a Si-SiON interlayer coupler utilizing low-refractive-index (n = 1.6) SiON are designed, demonstrating high coupling efficiency and potential for enhanced tolerance to manufacturing errors.