[18p-S2_203-1~10] 13.5 Semiconductor devices/ Interconnect/ Integration technologies | The 73rd JSAP Spring Meeting 2026

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Oral presentation13 Semiconductors : 13.5 Semiconductor devices/ Interconnect/ Integration technologies

[18p-S2_203-1~10]13.5 Semiconductor devices/ Interconnect/ Integration technologies

Wed. Mar 18, 2026 2:00 PM - 5:00 PM JST
Wed. Mar 18, 2026 5:00 AM - 8:00 AM UTC

S2_203 (South Bldg. 2)

2:00 PM - 2:30 PM JST(5:00 AM - 5:30 AM UTC)

[18p-S2_203-1][The 3rd Kenji Natori Award Speech] Oxide semiconductor-related technologies for next-generation integrated devices

〇Takanori Takahashi¹ (1.NAIST)

2:30 PM - 2:45 PM JST(5:30 AM - 5:45 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation AwardEnglish Presentation

[18p-S2_203-2]Study On the Statistical Variability of High-Performance Crystalline InGaOx Nanosheet Oxide Semiconductor FETs

〇(DC)Xingyu Huang¹, Kota Sakai¹, Anlan Chen¹, Takanori Takahashi³, Mutsunori Uenuma², Yukiharu Uraoka³, Takuya Saraya¹, Toshiro Hiramoto¹, Masaharu Kobayashi¹ (1.IIS, Univ. of Tokyo, 2.AIST, 3.NAIST)

2:45 PM - 3:00 PM JST(5:45 AM - 6:00 AM UTC)

[18p-S2_203-3]Research on Energy-Efficient DC-DC Converter for BSPDN Using Oxide Semiconductor TFT

〇Ayumu Nagai¹, Masaharu Kobayashi¹ (1.The Univ. of Tokyo)

3:00 PM - 3:15 PM JST(6:00 AM - 6:15 AM UTC)

[18p-S2_203-4]Ge-Bi-Te/Ge (111) van der Waals Interface for Realizing Low Specific Contact Resistivity

〇WENHSIN CHANG¹, S. HATAYAMA¹, N. OKADA¹, T. IRISAWA¹, T. MAEDA¹, Y. SAITO^1,2 (1.SFRC, AIST, 2.Tohoku Univ.)

3:15 PM - 3:30 PM JST(6:15 AM - 6:30 AM UTC)

[18p-S2_203-5]A Study on n-type Ge Contacts Using Conductive Oxide Film Electrodes

〇Koya Kudo^1,2, Chia-Tsong Chen², Wen Hsin Chang², Tatsuro Maeda² (1.Chiba Univ., 2.AIST)

3:45 PM - 4:00 PM JST(6:45 AM - 7:00 AM UTC)

[18p-S2_203-6]Metal Crystal Plating on Seedless Insulating Films Using New Electrolytic Technology

〇Haruo Iwatsu¹, Manabu Ishimaru² (1.KMP Lavatory, 2.Kyushu Institute of technology)

4:00 PM - 4:15 PM JST(7:00 AM - 7:15 AM UTC)

[18p-S2_203-7]Relationship between Oxidation and Superconducting Transition of RF/DC-Sputtered Nb Thin Films

〇Rozu Hemmi¹, Kensei Kugio¹, Yusuke Mizobata¹, Kaito Tabata¹, Sho Hamano¹, Mizuki Ogawa¹, Takahisa Tanaka¹, Masamitsu Tanaka², Munehiro Tada¹ (1.Keio Univ., 2.Nagoya Univ.)

4:15 PM - 4:30 PM JST(7:15 AM - 7:30 AM UTC)

[18p-S2_203-8]Study on Achieving Both Low Resistivity and High Adhesion of Ru Thin Films for Next-generation LSI Interconnects

〇Yusuke Mizobata¹, Kensei Kugio¹, Rozu Henmi¹, Kaito Tabata¹, Sho Hamano¹, Takahisa Tanaka¹, Munehiro Tada¹ (1.Keio Univ.)

4:30 PM - 4:45 PM JST(7:30 AM - 7:45 AM UTC)

[18p-S2_203-9]DFTB based Atomistic Simulation of PdCoO₂

〇Takahisa Tanaka¹ (1.Keio Univ.)

4:45 PM - 5:00 PM JST(7:45 AM - 8:00 AM UTC)

[18p-S2_203-10]Analysis and design of Nb ALD processes using neural network potential molecular mechanics

〇Noboru Sato¹, Akimasa Nakashima¹, Jun Yamaguchi¹, Naoki Tamaoki¹, Atsuhi Tsukune¹, Yukihiro Shimogaki¹ (1.The Univ. of Tokyo)

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