[MEETp1-1]Analysis the Correlation between Electron Beam Performance and EUV Lighting
*Umesh Balaso Apugade1, Iksu Kim1, Kyu Chang Park1
(1. Kyung Hee University (Korea))
Fri. Dec 6, 2024 4:50 AM - 6:10 AM UTC
*Umesh Balaso Apugade1, Iksu Kim1, Kyu Chang Park1
(1. Kyung Hee University (Korea))
*Ravindra Patil1, Aniket Karande1, Kyu Chang Park1
(1. Kyung Hee University (Korea))
*Aniket Ananda Karande1, Ravindra Patil1, Kyu Chang Park1
(1. Kyung Hee University (Korea))
*Yang-Hee Kim1, Sin Won Choi1, Yongwoo Kim1, Goo Min Park1, Donghyeok Shin1, Changhoon Lee1, Heesun Yang1
(1. Hongik University (Korea))
*Yuri Kim1, Seong Min Park1, Seunghyeok Ryu1, Hyun-Min Kim1, Beom Gyu Kim 1, Heesun Yang1
(1. Hongik University (Korea))
*Kodai Numata1, Keisuke Washo1, Kyung Ho Kim1
(1. Kitami Institute of Technology (Japan))
*Jiwon Sun1, Yuna Kim1, Seungchae Jung1, Taebin Lim1, Jin Jang1
(1. Kyung Hee University (Korea))
*Yuna Kim1, Jiwon Sun1, Seungchae Jung1, Jin Jang1
(1. Kyung Hee University (Korea))
*Seungchae Jung1, Hansol Jeong1, Yuna Kim1, Jiwon Sun1, Jin Jang1
(1. Kyung Hee University (Korea))
*Yun-Zhen Liu1, Chin-Cheng Weng2, Yung-Ting Chen1, Pei-Chun Chen1, Kazuto Nishikawa3, Teisou Kan3, Frank Huang4, Hung-Pin Hsu1, Yi-Ping Wang1
(1. Ming Chi University of Technology (Taiwan), 2. Industrial Technology Research Institute (Taiwan), 3. TOPCON Technohouse Corporation (Japan), 4. Denkei Technical Partner (Taiwan))
Chung-Jen Ou1, *Duan-Yi Hong2,3, Ching-Nan Chuang1
(1. Coretronic Corp. (Taiwan), 2. Academia Sinica (Taiwan), 3. National Taipei University of Technology (Taiwan))
*Takao Kokubun1
(1. Nikon Corporation (Japan))
Hyung Woo Choi1,2, *Dong-Wook Shin2,3
(1. University of Ottawa (Canada), 2. University of Cambridge (UK), 3. Hanbat National University (Korea))
Kaushlendra Agrahari1, Ming Han Chi1, S. Lakshmi Priya1, Chi Ming Liu1, Khurram Shazad1, Horng-Long Cheng2, *Yu-Wu Wang1
(1. National ChangHua University of Education (Taiwan), 2. National Cheng Kung University (Taiwan))
*Lin Xu1, Wei Huang1, Delang Lin1, Rongsheng Chen2, Man Chun Tseng2, Fion Sze Yan Yeung2, Hoi Sing Kwok2
(1. South China University of Technology (China), 2. The Hong Kong University of Science and Technology (Hong Kong))
*Tsuyoshi Fujiwara1, Junichi Oizumi1, Terutsune Osawa1
(1. Mitsubishi Chemical Corporation (Japan))
*YANG CUI1, Koichi Shimizu1, Takeo Miyake1
(1. Waseda University (Japan))
*Kazuya Takahashi1, Shintaro Izumi1,2, Yusaku Goto, Ryotaro Ohara1, Teppei Araki2, Sho Murase2, Hiroshi Kawaguchi1
(1. Kobe University (Japan), 2. Osaka University (Japan))
*Kazumasa Sasahara1, Yoshiyuki Kaiho1, Mikishige Sugasa1, Takaaki Abe2, Tsuyoshi Sekitani2, Yoshifumi Yoshida1, Teppei Araki2
(1. Seiko Future Creation Inc. (Japan), 2. Osaka University (Japan))
*Chehung Wei1, Tzu-Yang Huang1
(1. Tatung University (Taiwan))
*Min-Seok Jeon1, Jin-Sun Cha1, Jeong-Ryul Kim2, Duck-Hee Kim3, Yeon-Ho Jeong3
(1. Korea Testing Laboratory (Korea), 2. ICH Co. Ltd. (Korea), 3. APC Co. Ltd. (Korea))
*Atsuki Tsuji1, Junji Murata1
(1. Ritsumeikan University (Japan))
*Junsang Choi1, Jung Bin Shin1, Jong-Woong Kim1
(1. Sungkyunkwan University (SKKU) (Korea))
*Rina Aida1, Masahiro Inoue1
(1. Gunma University (Japan))
*Jinyan Huang1, Min Zhang2, Huanhuan Zhang2, Zhimin Yan2, Wangfeng Xi3, Rubo Xing3
(1. Hefei Visionox Technology Co., LTD. (China), 2. Yungu(Gu'an) Technology Co., LTD. (China), 3. Kunshan Govisionox Optolelectronics Co., LTD. (China))
*MunPyo Hong1, Jaewan Park1, Donghoon Kim1, Sooseong Lee1, Youngku Jin1, Gerhard Domann2, Daniela Collin2
(1. Korea University (Korea), 2. Fraunhofer-Institute for Silicate Research (Germany))
*Kazuki Kojima1, Moeto Okuda1, Takashi Kobayashi1, Hiroyoshi Naito2, Takashi Nagase1
(1. Osaka Metropolitan University (Japan), 2. Ritsumeikan University (Japan))