Session Details
[9a-N322-1~8]13.7 Compound and power devices, process technology and characterization
Tue. Sep 9, 2025 10:00 AM - 12:00 PM JST
Tue. Sep 9, 2025 1:00 AM - 3:00 AM UTC
Tue. Sep 9, 2025 1:00 AM - 3:00 AM UTC
N322 (Lecture Hall North)
[9a-N322-1]Investigation of InP-HEMT degradation mechanism during the back-end process
〇Taro Sasaki1, Hiroki Sugiyama1, Yuki Yoshiya1, Takuya Hoshi1, Yasuyuki Miyamoto2, Fumito Nakajima1 (1.NTT Device Technology Labs., 2.Inst. of Science Tokyo)
[9a-N322-2]Fabrication of AlGaN/GaN HBT with thinner Base layer
〇Shota Kokubo1, Tanaka Atushi2, Honda Yoshio2,3,4, Amano Hiroshi2,3,4 (1.Nagoya Univ., 2.IMaSS Nagoya Univ., 3.VBL Nagoya Univ., 4.IAR Nagoya Univ.)
[9a-N322-3]Demonstration of GaN Photoconductive Semiconductor Switch (PCSS) Utilizing a Semi-insulating GaN Substrate and Si-ion Implantation
〇Chinwei Li1, Kenji Iso2, Ryosho Nakane1, Takuya Maeda1 (1.UTokyo, 2.Mitsubishi Chemical Co.)
[9a-N322-4]Luminescence study of GaN implanted with low-dose Si, Al, and N ions
〇Kohei Shima1, Masahiro Horita2,3, Jun Suda2,3, Shoji Ishibashi4, Akira Uedono5, Shigefusa Chichibu1 (1.IMRAM-Tohoku Univ., 2.Nagoya Univ., 3.IMaSS-Nagoya Univ., 4.CCS-Univ. of Tsukuba, 5.Univ. of Tsukuba)
[9a-N322-5]Effect of inserting an AlN intermediate layer on atmospheric pressure activation of Mg ion-implanted GaN using OVPE
〇Shigeyoshi Usami1, Yuta Ito2, Sogo Yokoi1, Atsushi Tanaka3, Junichi Takino4, Tomoaki Sumi4, Masayuki Imanishi1, Masashi Yokoyama5, Masahiko Hata6, Yoshio Okayama4, Yoshio Honda3, Hiroshi Amano3, Yusuke Mori1 (1.UOsaka, 2.Nagoya Univ., 3.IMaSS Nagoya Univ., 4.Panasonic Holdings Corp., 5.Sumitomo Chemical Co., Ltd., 6.Itochu Plastics Inc.)
[9a-N322-6]One-dimensional unsteady thermal conduction simulation of pulsed-laser annealing for ion-implanted GaN using a diamond-like carbon film
〇Shuntaro Ono1, Asami Sugimoto1, Arihiro Nishigaki1, Yuzuka Minami2, Yosihiro Shimazaki2, Yuko Arai2, Masamitu Toramaru2, Yosito Jin2, Kazuyosi Tomita3, Daichi Imai1, Takao Miyajima1 (1.Meijo Univ., 2.JSW, 3.Nagoya Univ.)
[9a-N322-7]Low-temperature PL characterization of pulsed-laser-annealed Mg-ion-implanted GaN
〇Asami Sugimoto1, Shuntaro Ono1, Arihiro Nishigaki1, Yuzuka Minami2, Masamitsu Toramaru2, Yuko Arai2, Yoshihiro Shimazaki2, Yoshito Jin2, Kazuyoshi Tomita3, Daichi Imai1, Takao Miyajima1 (1.Meijo Univ., 2.JSW, 3.Nagoya Univ.)
[9a-N322-8]Electrical characterization of pulsed-laser annealed Si-ion implanted GaN
〇(M2)Arihiro Nishigaki1, Haruto Hirota1, Shuntaro Ono1, Asami Sugimoto1, Yuko Arai2, Yuzuka Minami2, Yoshihiro Shimazaki2, Masamitu Toramaru2, Yoshihito Jin2, Kazuyoshi Tomita3, Akira Uedono4, Daichi Imai1, Takao Miyajima1 (1.Meijo Univ., 2.JSW, 3.Nagoya Univ., 4.Tsukuba Univ.)