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2023 - 2026

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Year :2023 - 2026

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Search Results(228)

[Session_1-03]Vertical Channel-All-Around a-IGZO-FET Towards 2T1D eDRAM Design with Self-Boosted Storage-Node Voltage

*Wenxiang Tang1,2, Xufan Li1,2, Yue Zhao1,2, Xiaoyi Zhang1,2, Qingxiao Zhu1,2, Jingrui Guo3, Lingfei Wang1,2, Ling Li1,2(1. State Key Lab of Fabrication Technologies for Integrated Circuits, Institute of Microelectronics, Chinese Academy of Sciences, 2. University of Chinese Academy of Sciences, 3. School of Information Science and Engineering, Shandong University)

[Session_6-02]A First-Principles Study of F2 Selective Etching of Si/SiGe Stacks towards Sub-3 nm Node Transistor Manufacturing

*Qikai Zhao1,2, Junjie Li1, Hua Shao1, Rui Chen1, Lado Filipovic3(1. State Key Lab. of Fabrication Technologies for Integrated Circuits, Institute of Microelectronics, Chinese Academy of Sciences, 2. School of Integrated Circuits, Univ. of Chinese Academy of Sciences, 3. CDL for Multi-Scale Process Modeling of Semiconductor Devices and Sensors, Institute for Microelectronics, TU Wienna)

[Session_6-03]Geometry-Agnostic Feature-Scale PEALD Model

*Philipp Haslhofer1, Tobias Reiter1, Alexander Toifl2, Andreas Hössinger2, Lado Filipovic1(1. Institute for Microelectronics, TU Wien, 2. Silvaco Europe Ltd., Silvaco Inc.)

[Session_6-05]Surrogate-Assisted Calibration of a DRIE Process Model

*Roman Kostal1, Manuel Kleinbichler3, Stefano Di Nicola4, Lado Filipovic1,2(1. Inst. for Microelectronics, Tech. Univ. Vienna, 2. CDL for Multi-Scale Process Modeling of Semiconductor Devices and Sensors, 3. KAI Kompetenzzentrum Automobil- und Industrieelektronik GmbH, 4. Infineon Technologies Austria AG)

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