Session Details
[16p-K301-1~13]13.7 Compound and power devices, process technology and characterization
Sun. Mar 16, 2025 2:00 PM - 5:30 PM JST
Sun. Mar 16, 2025 5:00 AM - 8:30 AM UTC
Sun. Mar 16, 2025 5:00 AM - 8:30 AM UTC
K301 (Lecture Hall Bldg.)
Takuji Hosoi(Kwansei Gakuin Univ.)
[16p-K301-1][The 46th Young Scientist Award Speech] Real-time Visualization of 3D Temperature Distribution in SiC Wafers During Ultra-Rapid Thermal Annealing Using Optical-Interference Contactless Thermometry
〇Jiawen Yu1, Hiroaki Hanafusa1, Seiichiro Higashi1 (1.Hiroshima Univ.)
[16p-K301-2]Effect of High Temperature Annealing for Silicon-Cap-Annealed Contact on n-type 4H-SiC
〇Takahito Fukuzawa1, Hiroaki Hanafusa1, Seiichiro Higashi1 (1.Hiroshima Univ.)
[16p-K301-3]Comparison of electronic stopping powers of 4H-SiC and 2H-GaN for low-velocity <0001> channeled ions with atomic numbers of 12 to 15
〇Kazuhiro Mochizuki1, Tomoaki Nishimura1, Tomoyoshi Mishima1 (1.Hosei Univ.)
[16p-K301-4]Channeling ion implantation along with the <0001> direction in 4H-SiC: Are the Si- and C-faces the same?
〇Masashi Kato1 (1.NITech)
[16p-K301-5]Polytype ratio analysis of 3C-SiC/4H-SiC stacked epilayer on trenched 4H-SiC substrates by Raman spectroscopy
〇Takuhiro Hasegawa1, Hiroyuki Nagasawa2, Masashi Kato1 (1.Nagoya Inst. of Tech, 2.CUSIC Inc.)
[16p-K301-6]LOPC Raman spectra shift in SiC pn diode under forward bias condition
〇Kuniharu Kobashi1, Takuya Hoshii1,3, Anton Myalitsin2, Takashi Yoda3, Takayuki Ooba3, Kuniyuki Kakushima1,3 (1.Science Tokyo Inst., 2.ANVOS Analytics, Inc, 3.Science Tokyo WOW alliance)
[16p-K301-7]Sample thickness dependence of omnidirectional photoluminescence spectra for 4H-SiC epilayers
〇Hayaki Makino1, Kengo Suzuki2, Masashi Kato1 (1.NITech, 2.Hamamatsu Photonics K.K.)
[16p-K301-8]Microscopic mechanism of expansion of basal plane dislocation (BPD) in 4H-SiC by first-principles calculations
〇(M2)Masaki Sano1, Jun Kojima2, Shoichi Onda2, Takashi Yoda3, Takayuki Ohba3, Atsushi Oshiyama2, Kenji Shiraishi1,2 (1.Graduate School of Engineering, Nagoya Univ., 2.IMaSS, Nagoya Univ., 3.WOW Alliance, Inst. Sci. Tokyo)
[16p-K301-9]Suppression of stacking faults expansion by backside proton implantation into SiC substrates
〇Tong Li1, Hitoshi Sakane2, Shunta Harada3, Masashi Kato1 (1.NITech., 2.SHI-ATEX, 3.Nagoya Univ.)
[16p-K301-10]Suppression of bipolar degradation using low-BPD wafers
〇(P)Endong Zhang1, Haruko Inayoshi2, Tomohiko Sugiyama2, Kiyoshi Matsushima2, Jun Yoshikawa2, Masashi Kato1 (1.NITech, 2.NGK INSULATORS, LTD.)
[16p-K301-11]Si-polar 3C-SiC/diamond junctions for crystal growth of nitride
〇(B)Hikaru Iwamoto1, Yoshiki Sakaida2, Hiroki Uratani2, Naoteru Shigekawa3, Jianbo Liang3 (1.Osaka City Univ., 2.Air Water Inc., 3.Osaka Metropolitan Univ.)
[16p-K301-12]4050 h Continuous Operation of Diamond MOS Field Effect Transistors
Niloy Chandra Saha1, Tomoki Shiratsuchi1, Toshiyuki Oishi1, Masanori Eguchi2, 〇Makoto Kasu1 (1.Dept. Electrical Electronic Eng., Saga Univ., 2.Synchrotron, Saga Univ.)
[16p-K301-13]High Power Cut-off Frequency (fMAX) 74 GHz Diamond MOSFETs with Lg= 157 nm.
〇Niloy Chandra Saha1, Masanori Eguchi2, Yoshiki Muta1, Toshiyuki Oishi1, Makoto Kasu1 (1.Dept. Electrical Electronic Eng., Saga Univ., 2.Synchrotron Research Center, Saga Univ.)