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1969 - 2026

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International Conference on Solid State Devices and Materials

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Year :1969 - 2026

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[A-2-03]Impact of Ultrathin Oxygen-Passivated Interfacial Layer on Electron Mobility of MOSFETs in Scaled CET Regime

〇Yukinori Morita1,6, Takamasa Kawanago1,6, Takefumi Kamioka1,2,6, Yuichiro Mitani2,6, Toshihide Nabatame3,6, Takashi Onaya3,6, Naoki Fukata3,6, Wipakorn Jevasuwan3,6, Kazuhito Tukagoshi3,6, Takuya Hoshii4,6, Kasidit Toprasertpong5,6, Atsushi Tamura5,6, Koji Kita5,6, Naoya Okada1,6, Kenzo Manabe1,6, Wataru Mizubayashi1,6, Hiroyuki Ota1,6, Takashi Matsukawa1,6, Shinji Migita1,6(1. AIST (Japan), 2. Tokyo City Univ. (Japan), 3. NIMS (Japan), 4. Sci. Tokyo (Japan), 5. The Univ. Tokyo (Japan), 6. LSTC (Japan))

[A-3-03]Dual WFM Patterning in mCFET RMG: Understanding Patterning Limitations and Enabling Scalable Solutions

〇Camila Toledo de Carvalho Cavalcante1, Hiroaki Arimura1, Pallavi Puttarame Gowda1, Kenneth Lai1, Efrain Altamirano Sanchez1, Dmitry Batuk1, Thomas Chiarella1, Jerome Mitard1, Violeta Georgieva1, Harinarayanan Puliyalil1, Sujith Subramanian1, Lucas Petersen Barbosa Lima1, Steven Demuynck1, Naoto Horiguchi1, Serge Biesemans1(1. imec (Belgium))

[A-3-04]Dipole-Middle Scheme Enabled VFB Tuning with Reduced Thermal Budget in La2O3/HfO2 Gate Stack

〇Xingrong Xiao1,2, Haoyan Liu1, Yongliang Li1(1. State Key Laboratory of Fabrication Technologies for Integrated Circuits, Inst. of Microelectronics of the Chinese Academy of Sciences (China), 2. School of Advanced Interdisciplinary Sciences, Univ. of Chinese Academy of Sciences (China))

[A-3-05]Flat-Band Voltage Control and Variability Using an Ultra-Thin Al2O3 Dipole Layer: Analysis of Dipole and Fixed Charges

〇Takefumi Kamioka1,6, Toshihide Nabatame2,6, Hiroki Matsukawa3,6, Takamasa Kawanago1,6, Yukinori Morita1,6, Kasidit Toprasertpong3,6, Yuichiro Mitani4,6, Takashi Onaya2,6, Naoki Fukata2,6, Wipakorn Jevasuwan2,6, Kazuhito Tsukagoshi2,6, Takuya Hoshii5,6, Atsushi Tamura3,6, Koji Kita3,6, Naoya Okada1,6, Kenzou Manabe1,6, Wataru Mizubayashi1,6, Hiroyuki Ota1,6, Takashi Matsukawa1,6, Shinji Migita1,6(1. AIST (Japan), 2. NIMS (Japan), 3. The Univ. of Tokyo (Japan), 4. Tokyo City Univ. (Japan), 5. Science Tokyo (Japan), 6. LSTC (Japan))

[A-5-01]Standard Cell Performance Improvement with Ultra Low Temperature (<350°C) SiGe:B GAA Si Nanosheet P-FET

〇Arka Dutta1, Ritam Sarkar1, Pierre Eyben1, Daniel Casey2, Hiroaki Arimura1, Thomas Chiarella1, Anabela Veloso1, Andrea Pondini1,3, Alexander Makarov1, Lynn Verschueren1, Hans Mertens1, Clement Porret1, Thomas Dursap1, Jishnu Ganguly1, Conor Cullen2, Rami Khazaka2, Min Soo Kim1, Lucas Petersen Barbosa Lima1, Jerome Mitard1, Serge Biesemans1, Naoto Horiguchi1(1. imec (Belgium), 2. ASM (Belgium), 3. KU Leuven (Belgium))

[A-5-02]Process Optimization of GAAFET CMOS for Leakage Current Reduction

〇Kazuya Uejima1, Atsushi Yagishita1, Naoto Kumagai1, Chia-Tsong Chen1, Masanaga Fukasawa1, Shutaro Asanuma1, Toshihiro Kamei1, Yuuki Ishida1, Naoya Okada1, Kenzo Manabe1, Yuji Kasashima1, Hiroki Tonegawa1, Shin Kono1, Tetsuya Ueda1, Motoharu Shichiri1, Ryutaro Nishino1, Yoko Tanaka1, Takahiro Goya1, Jun'ichi Hattori1, Yukinori Morita1, Toshifumi Irisawa1, Wataru Mizubayashi1, Hiroyuki Ota1, Fuminori Ito1, Takashi Matsukawa1, Yoshihiro Hayashi1(1. National Inst. of AIST (Japan))

[A-5-03]Insights into Ultra-Scaled Nanosheet FETs for the Angstrom Era

〇Anabela Veloso1, Ruben Asanovski1, Jeroen E. Scheerder1, Daniel Casey2, Conor Cullen2, Clement Porret1, Thomas Dursap1, Geert Eneman1, Felix Seidel1, Claudia Fleischmann1, Paola Favia1, Ritam Sarkar1, Arka Dutta1, Xiuju Zhou1, Anne Vandooren1, Roger Loo1, Rami Khazaka2, Naoto Horiguchi1(1. imec (Belgium), 2. ASM (Belgium))

[A-5-05]Sub-Nanometer Tomographic Imaging of Resistance, Carrier Distribution and Effective Gate Length in 45 nm Gate Pitch Nanosheet-FETs

〇Andrea Pondini1,2, Pierre Eyben2, Lennaert Wouters2, Hiroaki Arimura2, Thomas Chiarella2, Hans Mertens2, Arka Dutta2, Albert Minj2, Clement Porret2, Erik Rosseel2, Philippe Matagne2, Thomas Hantschel2, Naoto Horiguchi2, Jérôme Mitard2, Anne Verhulst1,2(1. KU Leuven (Belgium), 2. imec (Belgium))

[A-6-01 (Invited)]Material-Driven Device-Level Thermal Management Strategies

〇Chang-Seok Lee1, Taehoon Kim1, Jaewon Kim Kim1, Jae Hong Lee1, Yoonhoo Ha1, Woochang Lee1(1. Samsung Advanced Institute of Tech. (Korea))

[A-6-02]Overlay and Grid Distortion Control in the Fabrication of Bonded CFET devices

〇Rajendra Kumar Saroj1, Andrea Mingardi1, Teresa Rodrigues1, Koen D'have1, Sandip Halder1, Hans Mertens1, Camila Cavalcante1, Hung-Chieh Tsai1, Serena Iacovo1, Steven Brems1, Min-Soo Kim1, Steven Demuynck1, Lucas Petersen Barbosa Lima1, Naoto Horiguchi1, Serge Biesemans1(1. IMEC (Belgium))

[A-6-04]Ultra-Doped In-Situ Si:P Raised S/D for performance improvement in view of 10 nm FD-SOI nMOSFETs

〇Krunoslav Romanjek1, Blend Mohamad1, Joël Kanyandekwe1, Zdenek Chalupa1, Micaël Charbonneau1, Valérie Lapras1, Théo Cabaret1, Tadeu Mota-Frutuoso1, Wissem Baik1, Fabien Bringuier1, Laurent Brévard1, Alexandre Magalhaes-Lucas1, Marie-Claire Cyrille1, Claire Fenouillet-Beranger1(1. Univ. Grenoble Alpes, CEA, Leti, F-38000 Grenoble, France (France))

[A-8-01 (Invited)]TBD

〇Ken Uchida1(1. The Univ. of Tokyo (Japan))

[A-8-02]Temperature Detection utilizing Superconducting Transition Temperature for Characterizing the Self-heating of Cryo-CMOS

〇Takumi Inaba1, Hidehiro Asai1, Tomoki Kashiwagi1,2, Takumi Katorhi1,3, Hiroshi Oka1, Kimihiko Kato1, Shota Iizuka1, Takashi Nakayama1, Satoshi Moriyama3, Takahiro Mori1(1. National Institute of Advanced Industrial Science and Technology (Japan), 2. Chuo University (Japan), 3. Tokyo Denki University (Japan))

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